Cryopump without integrated controller

The Cryopump without an integrated controller is a high-performance vacuum solution designed for applications requiring rapid evacuation and where large surface areas and water vapor contamination are concerns. This includes space simulation chambers, coating devices, sputtering systems in semiconductor production, and high-vacuum furnaces used for brazing and soldering .

This cryopump excels in its ability to condense all gases within it, offering superior efficiency compared to other pumps used for similar applications. It can be mounted in any orientation, reducing conductance losses when positioned on top or at the side of a vacuum chamber without the need for a 90-degree elbow . Additionally, cryopumps are quieter, with noise only associated with initial starts and the regeneration process .

 

The cryopump's advantages also lie in its high pumping speeds for water vapor (H2O), hydrogen (H2), and nitrogen (N2), providing faster evacuation times than other high-vacuum pumps. It is less sensitive to ionizing radiation and magnetic fields compared to turbomolecular pumps, making it suitable for environments where such conditions are prevalent . Moreover, cryopumps are more powerful than oil diffusion pumps in large vacuum vessels, offering significant pumping speeds without the risk of hydrocarbon contamination, as they are hydrocarbon-free . This feature is particularly beneficial for processes that require a clean vacuum, such as molecular beam epitaxy (MBE) and special R&D applications like beamline experiments in synchrotrons or storage rings .