| CWP Series Cryotrap | ||||||||
| Model | CWP100 | CWP160 | CWP200 | CWP250 | CWP320 | CWP400 | CWP500 | CWP550 |
| H2O Pumping spee（L/s） | 1100 | 2500 | 4000 | 7000 | 11000 | 1600 | 29000 | 39000 |
| N2 Conductance（L/s） | 500 | 1150 | 2000 | 3000 | 4500 | 7200 | 13500 | 20000 |
| Mounting flange | CF/ISO100 | CF/ISO160 | CF/ISO200 | CF/ISO250 | CF/ISO250 | CF/ISO250 | CF/ISO250 | CF/ISO250 |
| ICWP Series Cryotrap | ||||||||
| Model | ICWP100 | ICWP160 | ICWP200 | ICWP250 | ICWP320 | ICWP400 | ICWP500 | ICWP550 |
| H2O Pumping speed（L/s） | 1100 | 2500 | 4000 | 7000 | 11000 | 1600 | 29000 | 39000 |
| N2 Conductance（L/s） | 500 | 1150 | 2000 | 3000 | 4500 | 7200 | 13500 | 20000 |
| Mounting flange | CF/ISO100 | CF/ISO160 | CF/ISO200 | CF/ISO250 | CF/ISO250 | CF/ISO250 | CF/ISO250 | CF/ISO250 |
| CTP Series Cryopump | |||||||
| Model | CTP200 | CTP200W | CTP250 | CTP250W | CTP320 | CTP320W | |
| Pumping speed（L/s） | Nitrogen gas | 1700 | 1500 | 2400 | 2400 | 4000 | 4000 |
| Hydrogen gas | 2700 | 2200 | 3600 | 3600 | 6000 | 6000 | |
| Argon gas | 1400 | 1200 | 2000 | 2000 | 3300 | 3300 | |
| Water vapor H2O | 4000 | 4000 | 6900 | 6900 | 11000 | 11000 | |
| Pumping capacity（Std.L） | Argon gas | 1000 | 1000 | 2000 | 2000 | 3100 | 3100 |
| Hydrogen gas | 17 | 12 | 16 | 16 | 20 | 20 | |
| Maximum throughput （Pa.L/s） | Argon gas | 1.2×103(700 sccm) | 1.2×103(700 sccm) | 1.2×103(700 sccm) | 1.2×103(700 sccm) | 1.5×103(900 sccm) | 1.5×103(900 sccm) |
| Crossover Rating（Torr.L） | Argon gas | 150 | 150 | 150 | 150 | 300 | 300 |
| Ultimate pressure（Pa） | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | |
| Mounting flange | CF/ANSI/ISO200 | CF/ANSI/ISO200 | CF/ANSI/UVG/ISO250 | CF/ANSI/UVG/ISO250 | CF/ANSI/UVG/ISO320 | CF/ANSI/UVG/ISO320 | |
| Weight of cryopump（Kg） | 20 | 19 | 30 | 28 | 40 | 40 | |
| Cooldown time（min） | 100 | 100 | 110 | 110 | 120 | 120 | |
| CTP Series Cryopump | |||||||
| Model | CTP400 | CTP500 | CTP550 | CTP630 | CTP720 | CTP800 | |
| Pumping speed（L/s） | Nitrogen gas | 6000 | 10000 | 17000 | 18000 | 21000 | 28000 |
| Hydrogen gas | 10000 | 18000 | 25000 | 30000 | 39000 | 46000 | |
| Argon gas | 5000 | 8400 | 14000 | 14500 | 19000 | 23500 | |
| Water vapor H2O | 16000 | 29000 | 39000 | 46000 | 57000 | 71000 | |
| Pumping capacity（Std.L） | Argon gas | 4300 | 5800 | 8100 | 8200 | 8400 | 8500 |
| Hydrogen gas | 24 | 46 | 85 | 120 | 130 | 150 | |
| Maximum throughput （Pa.L/s） | Argon gas | 1.5×103(900 sccm) | 1.7×103(1000 sccm) | 1.7×103(1000 sccm) | 2.0×103(1200 sccm) | 2.0×103(1200 sccm) | 2.0×103(1200 sccm) |
| Crossover Rating（Torr.L） | Argon gas | 300 | 500 | — | — | — | — |
| Ultimate pressure（Pa） | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | |
| Mounting flange | ANSI/UVG/ISO400 | ANSI/UVG/ISO500 | UVG/ISO550 | ISO630 | UVG720 | ISO800 | |
| Weight of cryopump（Kg） | 70 | 104 | 120 | 190 | 210 | 255 | |
| Cooldown time（min） | 120 | 150 | 180 | 150 | 180 | 220 | |
| ICTP Series Cryopump | |||||||
| Model | ICTP150 | ICTP200 | ICTP200W | ICTP250 | ICTP250W | ||
| for PVD | for Ion Implant | ||||||
| Pumping speed（L/s） | Nitrogen gas | 800 | 1500 | 1500 | 2400 | 2400 | 2200 |
| Hydrogen gas | 1200 | 2500 | 2200 | 3600 | 3600 | 7000 | |
| Argon gas | 650 | 1200 | 1200 | 2000 | 2000 | 1800 | |
| Water vapor H2O | 2500 | 4000 | 4000 | 6500 | 6500 | 6500 | |
| Pumping capacity（Std.L） | Argon gas | 500 | 1000 | 1000 | 2000 | 2000 | — |
| Hydrogen gas | 9 | 12 | 12 | 16 | 16 | 24 | |
| Maximum throughput （Pa.L/s） |
Argon gas | 1.2×103(700 sccm) | 1.2×103(700 sccm) | 1.2×103(700 sccm) | 1.2×103(700 sccm) | 1.2×103(700 sccm) | 1.0×103(600 sccm) |
| Crossover Rating （Torr.L） |
Argon gas | 100 | 150 | 150 | 150 | 150 | 150 |
| Ultimate pressure（Pa） | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | |
| Mounting flange | CF/ANSI/ISO150 | CF/ANSI/ISO200 | CF/ANSI/ISO200 | CF/ANSI/UVG/ISO250 | CF/ANSI/UVG/ISO250 | CF/ANSI/UVG/ISO250 | |
| Weight of cryopump（Kg） | 20 | 32 | 30 | 35 | 32 | 32 | |
| Regeneration time（min） | Full Regeneration - Cold to Cold | 84 | 90 | 90 | 115 | 115 | 115 |
| Fast Regeneration | 42 | 35 | 35 | 50 | 50 | 50 | |
| ICTP Series Cryopump | ||||||
| Model | ICTP320 | ICTP320W | ICTP400 | ICTP500 | ||
| for PVD | for Ion Implant | |||||
| Pumping speed（L/s） | Nitrogen gas | 4000 | 4000 | 3600 | 6000 | 10000 |
| Hydrogen gas | 6000 | 6000 | 13000 | 12000 | 18000 | |
| Argon gas | 3300 | 3300 | 3000 | 5000 | 8400 | |
| Water vapor H2O | 11000 | 11000 | 11000 | 17500 | 30000 | |
| Pumping capacity（Std.L） | Argon gas | 3100 | 3100 | — | 4300 | 6000 |
| Hydrogen gas | 20 | 20 | 40 | 42 | 46 | |
| Maximum throughput （Pa.L/s） |
Argon gas | 1.5×103(900 sccm) | 1.5×103(900 sccm) | 1.5×103(900 sccm) | 1.5×103(900 sccm) | 1.7×103(1000 sccm) |
| Crossover Rating （Torr.L） |
Argon gas | 300 | 300 | 300 | 300 | 600 |
| Ultimate pressure（Pa） | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | |
| Mounting flange | CF/ANSI/UVG/ISO320 | CF/ANSI/UVG/ISO320 | CF/ANSI/UVG/ISO320 | ANSI/UVG/ISO400 | UVG/ISO500 | |
| Weight of cryopump（Kg） | 48 | 45 | 45 | 77 | 80 | |
| Regeneration time（min） | Full Regeneration - Cold to Cold | 150 | 150 | 150 | 180 | 200 |
| Fast Regeneration | 75 | 75 | 75 | 90 | — | |
