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Cryopump

CTP Series Cryopump
Model CTP200 CTP200W CTP250 CTP250W CTP320 CTP320W
Pumping speed（L/s） Nitrogen gas 1700 1500 2400 2400 4000 4000
Hydrogen gas 2700 2200 3600 3600 6000 6000
Argon gas 1400 1200 2000 2000 3300 3300
Water vapor H2O 4000 4000 6900 6900 11000 11000
Pumping  capacity（Std.L） Argon gas 1000 1000 2000 2000 3100 3100
Hydrogen gas 17 12 16 16 20 20
Maximum throughput （Pa.L/s） Argon gas 1.2×103(700 sccm) 1.2×103(700 sccm) 1.2×103(700 sccm) 1.2×103(700 sccm) 1.5×103(900 sccm) 1.5×103(900 sccm)
Crossover Rating（Torr.L） Argon gas 150 150 150 150 300 300
Ultimate pressure（Pa） 10-7 10-7 10-7 10-7 10-7 10-7
 Mounting flange CF/ANSI/ISO200 CF/ANSI/ISO200 CF/ANSI/UVG/ISO250 CF/ANSI/UVG/ISO250 CF/ANSI/UVG/ISO320 CF/ANSI/UVG/ISO320
Weight of cryopump（Kg） 20 19 30 28 40 40
Cooldown time（min） 100 100 110 110 120 120
 
 
 
 
 
CTP Series Cryopump
Model CTP400 CTP500 CTP550 CTP630 CTP720 CTP800
Pumping speed（L/s） Nitrogen gas 6000 10000 17000 18000 21000 28000
Hydrogen gas 10000 18000 25000 30000 39000 46000
Argon gas 5000 8400 14000 14500 19000 23500
Water vapor H2O 16000 29000 39000 46000 57000 71000
Pumping  capacity（Std.L） Argon gas 4300 5800 8100 8200 8400 8500
Hydrogen gas 24 46 85 120 130 150
Maximum throughput （Pa.L/s） Argon gas 1.5×103(900 sccm) 1.7×103(1000 sccm) 1.7×103(1000 sccm) 2.0×103(1200 sccm) 2.0×103(1200 sccm) 2.0×103(1200 sccm)
Crossover Rating（Torr.L） Argon gas 300 500 — — — —
Ultimate pressure（Pa） 10-7 10-7 10-7 10-7 10-7 10-7
 Mounting flange ANSI/UVG/ISO400 ANSI/UVG/ISO500 UVG/ISO550 ISO630 UVG720 ISO800
Weight of cryopump（Kg） 70 104 120 190 210 255
Cooldown time（min） 120 150 180 150 180 220
 
 
 
ICTP Series Cryopump
Model ICTP150 ICTP200 ICTP200W ICTP250 ICTP250W
for PVD for Ion Implant
Pumping speed（L/s） Nitrogen gas 800 1500 1500 2400 2400 2200
Hydrogen gas 1200 2500 2200 3600 3600 7000
Argon gas 650 1200 1200 2000 2000 1800
Water vapor H2O 2500 4000 4000 6500 6500 6500
Pumping  capacity（Std.L） Argon gas 500 1000 1000 2000 2000 —
Hydrogen gas 9 12 12 16 16 24
Maximum throughput
（Pa.L/s）		 Argon gas 1.2×103(700 sccm) 1.2×103(700 sccm) 1.2×103(700 sccm) 1.2×103(700 sccm) 1.2×103(700 sccm) 1.0×103(600 sccm)
Crossover Rating
（Torr.L）		 Argon gas 100 150 150 150 150 150
Ultimate pressure（Pa） 10-7 10-7 10-7 10-7 10-7 10-7
Mounting flange CF/ANSI/ISO150 CF/ANSI/ISO200 CF/ANSI/ISO200 CF/ANSI/UVG/ISO250 CF/ANSI/UVG/ISO250 CF/ANSI/UVG/ISO250
Weight of cryopump（Kg） 20 32 30 35 32 32
Regeneration time（min） Full Regeneration - Cold to Cold  84 90 90 115 115 115
Fast Regeneration 42 35 35 50 50 50
 
 
 
ICTP Series Cryopump
Model ICTP320 ICTP320W ICTP400 ICTP500
for PVD for Ion Implant
Pumping speed（L/s） Nitrogen gas 4000 4000 3600 6000 10000
Hydrogen gas 6000 6000 13000 12000 18000
Argon gas 3300 3300 3000 5000 8400
Water vapor H2O 11000 11000 11000 17500 30000
Pumping  capacity（Std.L） Argon gas 3100 3100 — 4300 6000
Hydrogen gas 20 20 40 42 46
Maximum throughput
（Pa.L/s）		 Argon gas 1.5×103(900 sccm) 1.5×103(900 sccm) 1.5×103(900 sccm) 1.5×103(900 sccm) 1.7×103(1000 sccm)
Crossover Rating
（Torr.L）		 Argon gas 300 300 300 300 600
Ultimate pressure（Pa） 10-7 10-7 10-7 10-7 10-7
Mounting flange CF/ANSI/UVG/ISO320 CF/ANSI/UVG/ISO320 CF/ANSI/UVG/ISO320 ANSI/UVG/ISO400 UVG/ISO500
Weight of cryopump（Kg） 48 45 45 77 80
Regeneration time（min） Full Regeneration - Cold to Cold  150 150 150 180 200
Fast Regeneration 75 75 75 90 —
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