Cryopump with built-in integrated controller

The Cryopump with a built-in integrated controller is a state-of-the-art vacuum solution designed for high-performance industrial and research applications. This cryopump offers fully automated operation, ensuring efficient and reliable gas evacuation, particularly for water vapor, air, hydrogen, and argon. Its compact design and advanced control system make it an ideal choice for environments where rapid cycling and minimal downtime are critical. With the integrated controller, this cryopump is capable of enhancing system operation and improving overall tool productivity.

Product Advantages:

1. Fast Regen Capability: This feature extends the performance of the cryopump between regenerations, reducing downtime and increasing the overall efficiency of the system.

2. Simultaneous Regeneration: By networking cryopumps, this capability speeds up overall system regeneration, further enhancing productivity and reducing the time required for maintenance.

3. Embedded Microprocessor Control: The built-in controller features an embedded microprocessor that enhances performance, performs diagnostic routines, and provides communication capabilities, ensuring optimal operation and ease of maintenance.