High-performance cryopump with integrated controller

Product Introduction: The High-performance cryopump with an integrated controller is a cutting-edge vacuum solution designed for demanding applications in various industries, including semiconductor manufacturing, thin film deposition, and scientific research. This Cryopump stands out for its large-diameter design, high pumping speeds, and capacity, optimized for critical gas species in PVD, evaporation, and general vacuum applications. It is ideal for applications requiring consistent vacuum performance, such as power devices, LED manufacturing, MEMS, photonics, flat panel display, optical coating, metal deposition, and space chamber applications. The integrated controller enables automated operation of critical processes, including regeneration, power fail recovery, process temperature control, and system diagnostics with historic data logging.

Product Advantages:

1. Advanced Control and Automation: The integrated controller provides precise control over vacuum performance with intelligent On-Board IS Controls, ensuring reliable and consistent operation.
2. Extended Time Between Regenerations: Thanks to high Argon and Nitrogen capacities, the cryopump offers extended periods between regenerations, reducing maintenance frequency and increasing uptime.
3. Energy Efficiency: When used with an On-Board IS-2000V Compressor, the cryopump delivers significant energy savings on multi-pump systems, making it an eco-friendly and cost-effective choice.