ICTP150 semiconductor intelligent cryopump

ICTP150 semiconductor intelligent cryopump

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Incoterm:	FOB,CFR,CIF,EXW
Min. Order:	1 Set/Sets
Transportation:	Ocean,Land,Air,Express

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Product Description

Product Attributes

Packaging & Delivery

Product Description

Product Attributes

Brand: bamasupercon

Packaging & Delivery

Selling Units

Set/Sets

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Product Description

The ICTP semiconductor intelligent cryogenic pumpsystem is a fully intelligent cryogenic pump system withautomatic operation, rapid regeneration,and completeregeneration capabilities, as well as the ability to performremote monitoring.

The ICTP150mm Semiconductor Intelligent Cryopump is a cutting-edge vacuum technology designed for the semiconductor industry. With a 150mm diameter, it offers precise control and high efficiency in achieving ultra-high vacuum levels. This intelligent cryopump is equipped with advanced sensors and controls, ensuring optimal performance and reliability in critical processes such as etching and deposition. Its compact size and smart features make it an ideal solution for semiconductor manufacturing facilities.

Main feature

1.It has fast regeneration function

2.lt has complete regeneration function

3.Automatically detect the vacuum degree of cryogenicpump

4.Automatic regeneration system for internal heating andnitrogen filling

5.External nitrogen charging device

6.Equipped with a safety valve that can be connected tothe tail gas treatment device

7.Intelligent "adaptive" technology-Automatic low temperature thermal load compensation-Wariable frequency motor system

8.Lover aoquisition costs-Each Compressor can support more pumps-More energy efficient without any change in capacity-Wariable speed motor can maximize pump life

9.Local or remote operation can be realized

10.Equipped with operation handle, can realize fault queryand modify parameters

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