ICTP400 semiconductor intelligent cryopump

The ICTP400 Semiconductor Intelligent Cryopump is a high-capacity vacuum solution designed for the rigorous demands of advanced semiconductor manufacturing processes. This cryopump is recognized for its superior performance in pumping speeds and gas capacities, ensuring efficient and reliable operation in critical vacuum applications. With its large diameter configuration, the ICTP400 offers enhanced throughput and reduced downtime, making it an ideal choice for processes that require high water vapor pumping speeds and large gas capacities.

 

Product Advantages

 

1. High Pumping Speeds: The ICTP400 boasts impressive pumping speeds for various gases, including water vapor at 17,500 liters per second, air at 6,000 liters per second, and hydrogen at 12,000 liters per second, which significantly contributes to faster cycle times and improved productivity in semiconductor processes.

 

2. Large Gas Capacities: This cryopump features substantial gas capacities, with the ability to handle large gas loads, particularly hydrogen with a capacity of 42 standard liters. This high capacity is crucial for maintaining vacuum integrity during long process cycles, reducing the frequency of regenerations and enhancing overall tool uptime.