ICTP320W semiconductor intelligent cryopump

The ICTP320W Semiconductor Intelligent Cryopump is a high-performance vacuum solution designed to meet the rigorous demands of ion implant processes in the semiconductor industry. This cryopump is engineered to provide enhanced hydrogen pumping speed and capacity, which are crucial for improving product yield and tool throughput. With intelligent system controls, it offers better process quality, vacuum consistency, and uptime, adapting to changing heat/gas loading conditions for enhanced vacuum consistency and improved inter-wafer recovery time.

 

 

1. Optimized for Tool Throughput: The ICTP320W features a 33% increased hydrogen capacity and a 10% increase in hydrogen pumping speed compared to previous models, which is optimized for tool throughput. This results in higher productivity and reduced process times.

 

2. Intelligent Self-Adjusting Technology: This cryopump is equipped with automatic cryogenic heat load compensation and a variable speed motor and control system, which reduce vibration. These features allow for real-time system knowledge for managing motor speed and cryogenic temperature, enhancing the overall performance and reliability of the pump.