Home> Products> Cryopump> ICTP Series Cryopump> ICTP320 semiconductor intelligent cryopump
ICTP320 semiconductor intelligent cryopump
ICTP320 semiconductor intelligent cryopump
ICTP320 semiconductor intelligent cryopump
ICTP320 semiconductor intelligent cryopump

ICTP320 semiconductor intelligent cryopump

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Payment Type:L/C,T/T
Incoterm:FOB,CFR,CIF,EXW
Min. Order:1 Set/Sets
Transportation:Ocean,Land,Air,Express
Product Attributes

Brandbamasupercon

Packaging & Delivery
Selling Units : Set/Sets

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Product Description
The ICTP320 Semiconductor Intelligent Cryopump is a cutting-edge vacuum solution specifically designed to meet the challenges of modern ion implant processes. This cryopump is engineered to deliver the highest hydrogen vacuum pumping speed and capacity, ensuring improved product yield and tool throughput. With its intelligent system control, it provides better process quality, vacuum consistency, and uptime, offering real-time system information for optimum control of array temperatures. The vacuum quality is further enhanced by automatic adaptation to changing thermal/gas loading conditions, which improves inter-wafer recovery time and overall system reliability.
 

Product Advantages:

  1. Enhanced Hydrogen Pumping Speed and Capacity: The ICTP320 is designed to offer a significant increase in hydrogen pumping speed and capacity, which is crucial for ion implant applications. This feature helps to combat the impact of hydrogen gas on tool throughput and product yield, ensuring efficient and effective vacuum management.

  2. Intelligent Self-Adjusting Technology: This cryopump utilizes an intelligent system that automatically compensates for changing heat and gas loading conditions. The variable speed motor and control system with reduced vibration contribute to enhanced vacuum consistency and improved inter-wafer recovery time, leading to increased productivity and reduced downtime.

 
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