ICTP250W semiconductor intelligent cryopump

ICTP250W semiconductor intelligent cryopump

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Incoterm:	FOB,CFR,EXW,CIF
Min. Order:	1 Set/Sets
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Product Description

Product Attributes

Packaging & Delivery

Product Description

Product Attributes

Brand: bamasupercon

Packaging & Delivery

Selling Units

Set/Sets

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Product Description

The ICTP semiconductor intelligent cryogenic pumpsystem is a fully intelligent cryogenic pump system withautomatic operation, rapid regeneration,and completeregeneration capabilities, as well as the ability to performremote monitoring.

The ICTP250W Semiconductor Intelligent Cryopump is a high-performance vacuum solution designed for the semiconductor industry. With an inner diameter of 250mm, it offers superior pumping speeds and advanced control systems for precise vacuum management. This cryopump is equipped with intelligent features that adapt to varying process conditions, ensuring optimal performance and reliability in critical semiconductor processes such as etching and deposition.

Main feature

1.It has fast regeneration function

2.lt has complete regeneration function

3.Automatically detect the vacuum degree of cryogenicpump

4.Automatic regeneration system for internal heating andnitrogen filling

5.External nitrogen charging device

6.Equipped with a safety valve that can be connected tothe tail gas treatment device

7.Intelligent "adaptive" technology-Automatic low temperature thermal load compensation-Wariable frequency motor system

8.Lover aoquisition costs-Each Compressor can support more pumps-More energy efficient without any change in capacity-Wariable speed motor can maximize pump life

9.Local or remote operation can be realized

10.Equipped with operation handle, can realize fault queryand modify parameters

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